Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486437 | Apparatus for transforming semiconducting thin layer | — | 2002-11-26 |
| 6461749 | Organic boron compound, process for producing the compound and organic luminescence device using the compound | Kazunori Ueno, Koichi Suzuki, Akihiro Senoo, Seiichi Yogi | 2002-10-08 |
| 6444327 | Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film | Katsuhisa Yuda | 2002-09-03 |
| 6444508 | Method of manufacturing thin film transistor | Katsuhisa Yuda, Hiroshi Okumura, Yoshinobu Sato | 2002-09-03 |
| 6383299 | Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film | Katsuhisa Yuda | 2002-05-07 |
| 6372039 | Method and apparatus for irradiation of a pulse laser beam | Hiroshi Okumura | 2002-04-16 |