Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448150 | Method for forming shallow trench isolation in the integrated circuit | Hsin-Chuan Tsai | 2002-09-10 |
| 6403483 | Shallow trench isolation having an etching stop layer and method for fabricating same | Chung-Peng Hao, Chung-Lin Huang, Chung-Yuan Lee, Yih-Ren Shao | 2002-06-11 |
| 6368912 | Method of fabricating an isolation structure between a vertical transistor and a deep trench capacitor | Chi-Han Chang, Tzu-En He, Hsin-Chuan Tsai | 2002-04-09 |