Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448150 | Method for forming shallow trench isolation in the integrated circuit | Pei-Ing Lee | 2002-09-10 |
| 6368912 | Method of fabricating an isolation structure between a vertical transistor and a deep trench capacitor | Chi-Han Chang, Tzu-En He, Pei-Ing Lee | 2002-04-09 |
| 6365506 | Dual-damascene process with porous low-K dielectric material | Chih-Han Chang | 2002-04-02 |