Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403489 | Method for removing polymer stacked on a lower electrode within an etching reaction chamber | Kuang-Yung Wu, Shih-Chi Lai, Kuo-tsai Kao | 2002-06-11 |
| 6374833 | Method of in situ reactive gas plasma treatment | Shih-Chi Lai, Yen-Chung Feng, Tsung-Hua Wu | 2002-04-23 |