Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403489 | Method for removing polymer stacked on a lower electrode within an etching reaction chamber | Tien-Min Yuan, Kuang-Yung Wu, Kuo-tsai Kao | 2002-06-11 |
| 6374833 | Method of in situ reactive gas plasma treatment | Tien-Min Yuan, Yen-Chung Feng, Tsung-Hua Wu | 2002-04-23 |
| 6365455 | Flash memory process using polysilicon spacers | Wen-Doe Su, Thomas Chang, Kuo-Tung Sung, Mao-Song Tseng, Kun-Yu Sung +1 more | 2002-04-02 |