Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6386139 | Wafer load/unload apparatus for E-Gun evaporation process | Hua-Jen Tseng, Chun-Chieh Lee, Gwo-Yuh Yang | 2002-05-14 |
| 6386213 | Plate-tilting apparatus | Hua-Jen Tseng, Chun-Chieh Lee, Yu-Hua Yeh | 2002-05-14 |