Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6386139 | Wafer load/unload apparatus for E-Gun evaporation process | Sheng-Feng Hung, Hua-Jen Tseng, Gwo-Yuh Yang | 2002-05-14 |
| 6386213 | Plate-tilting apparatus | Sheng-Feng Hung, Hua-Jen Tseng, Yu-Hua Yeh | 2002-05-14 |
| 6334258 | Inspection device for examining a piece of aperture graphite of an extraction electrode | Hua-Jen Tseng, Dong-Tay Tsai, Yi-Hua Chin | 2002-01-01 |