Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491435 | Linear robot | Thomas F. Carlos | 2002-12-10 |
| 6475284 | Gas dispersion head | Gary M. Moore | 2002-11-05 |
| 6443618 | Particulate free air bearing and seal | Thomas F. Carlos | 2002-09-03 |
| 6428609 | Exhaust particulate controller and method | Gary M. Moore | 2002-08-06 |
| 6347749 | Semiconductor processing reactor controllable gas jet assembly | Gary M. Moore | 2002-02-19 |