Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475284 | Gas dispersion head | Katsuhito Nishikawa | 2002-11-05 |
| 6428609 | Exhaust particulate controller and method | Katsuhito Nishikawa | 2002-08-06 |
| 6347749 | Semiconductor processing reactor controllable gas jet assembly | Katsuhito Nishikawa | 2002-02-19 |