Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399410 | Method of anodizing silicon substrate and method of producing acceleration sensor | Hitoshi Iwata | 2002-06-04 |
| 6362079 | Semiconductor device and method of anodization for the semiconductor device | Hitoshi Iwata | 2002-03-26 |
| 6336658 | Acceleration switch and the manufacturing method | Koichi Itoigawa, Yutaka Yoshida | 2002-01-08 |