Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399410 | Method of anodizing silicon substrate and method of producing acceleration sensor | Makoto Murate | 2002-06-04 |
| 6386091 | Continuous processing apparatus | Takaaki Shimizu, Katsuyuki Iwahata | 2002-05-14 |
| 6378368 | Oscillation gyro equipped with thin PZT film | Koichi Itoigawa | 2002-04-30 |
| 6362079 | Semiconductor device and method of anodization for the semiconductor device | Makoto Murate | 2002-03-26 |