Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447962 | Method for repairing MoSi attenuated phase shift masks | — | 2002-09-10 |
| 6373976 | Method and apparatus to accurately correlate defect coordinates between photomask inspection and repair systems | Christophe Pierrat | 2002-04-16 |