Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483160 | Micromechanical enclosure | Albert Engelhardt, Bernhard Hartmann, Ulrich Prechtel | 2002-11-19 |
| 6474162 | Micromechanical rate of rotation sensor (DRS) | Ralf Voss, Karin Bauer, Matthias Rose, Erwin Stenzel, Josef Schalk +1 more | 2002-11-05 |
| 6389898 | Microsensor with a resonator structure | Matthias Aikele, Ulrich Prechtel, Oliver Nagler, Karl Kühl | 2002-05-21 |