Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483160 | Micromechanical enclosure | Albert Engelhardt, Bernhard Hartmann, Helmut Seidel | 2002-11-19 |
| 6389898 | Microsensor with a resonator structure | Helmut Seidel, Matthias Aikele, Oliver Nagler, Karl Kühl | 2002-05-21 |