Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479386 | Process for reducing surface variations for polished wafer | Kan-Yin Ng, Henry F. Erk, Darrel Harris, James Jose, Stephen Hensiek +3 more | 2002-11-12 |
| 6454635 | Method and apparatus for a wafer carrier having an insert | Guoqiang Zhang, Henry F. Erk | 2002-09-24 |