Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497403 | Semiconductor wafer holder | — | 2002-12-24 |
| 6339016 | Method and apparatus for forming an epitaxial silicon wafer with a denuded zone | Tom Torack | 2002-01-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497403 | Semiconductor wafer holder | — | 2002-12-24 |
| 6339016 | Method and apparatus for forming an epitaxial silicon wafer with a denuded zone | Tom Torack | 2002-01-15 |