Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485992 | Process for making wafers for ion implantation monitoring | — | 2002-11-26 |
| 6482269 | Process for the removal of copper and other metallic impurities from silicon | Carissima M. Vitus | 2002-11-19 |