Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489231 | Method for forming barrier and seed layer | Kiran Kumar, Wilbur G. Gatabay | 2002-12-03 |
| 6472314 | Diamond barrier layer | Wilbur G. Catabay | 2002-10-29 |
| 6368979 | Process for forming trenches and vias in layers of low dielectric constant carbon-doped silicon oxide dielectric material of an integrated circuit structure | Wilbur G. Catabay, Joe W. Zhao | 2002-04-09 |