Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451158 | Apparatus for detecting the endpoint of a photoresist stripping process | Tuqiang Ni | 2002-09-17 |
| 6388383 | Method of an apparatus for obtaining neutral dissociated gas atoms | Tuqiang Ni | 2002-05-14 |