Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465159 | Method and apparatus for side wall passivation for organic etch | Nancy Tran | 2002-10-15 |
| 6461974 | High temperature tungsten etching process | Kenji Takeshita, Thomas S. Choi | 2002-10-08 |
| 6451158 | Apparatus for detecting the endpoint of a photoresist stripping process | Wenli Collison | 2002-09-17 |
| 6388383 | Method of an apparatus for obtaining neutral dissociated gas atoms | Wenli Collison | 2002-05-14 |