Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482678 | Wafer preparation systems and methods for preparing wafers | David T. Frost | 2002-11-19 |
| 6477786 | Apparatus for drying batches of disks | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-11-12 |
| 6461224 | Off-diameter method for preparing semiconductor wafers | David T. Frost | 2002-10-08 |
| 6457199 | Substrate processing in an immersion, scrub and dry system | David T. Frost, Mike Wallis | 2002-10-01 |
| 6446355 | Disk drying apparatus and method | Kenneth C. McMahon, Jonathan Borkowski, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-09-10 |
| 6439978 | Substrate polishing system using roll-to-roll fixed abrasive | David T. Frost | 2002-08-27 |
| 6430841 | Apparatus for drying batches of wafers | Jonathan Borkowski, Kenneth C. McMahon, Scott Petersen, Donald E. Stephens, Yassin Mehmandoust +1 more | 2002-08-13 |
| 6427566 | Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same | John G. Dewit | 2002-08-06 |
| 6368192 | Wafer preparation apparatus including variable height wafer drive assembly | David T. Frost, John G. Dewit | 2002-04-09 |
| 6345404 | Wafer cleaning apparatus | Donald E. Stephens, Hugo John Miller, III | 2002-02-12 |