Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482678 | Wafer preparation systems and methods for preparing wafers | Oliver David Jones | 2002-11-19 |
| 6461224 | Off-diameter method for preparing semiconductor wafers | Oliver David Jones | 2002-10-08 |
| 6457199 | Substrate processing in an immersion, scrub and dry system | Oliver David Jones, Mike Wallis | 2002-10-01 |
| 6439978 | Substrate polishing system using roll-to-roll fixed abrasive | Oliver David Jones | 2002-08-27 |
| 6368192 | Wafer preparation apparatus including variable height wafer drive assembly | Oliver David Jones, John G. Dewit | 2002-04-09 |
| 6347977 | Method and system for chemical mechanical polishing | — | 2002-02-19 |