Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428859 | Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) | Tony P. Chiang | 2002-08-06 |
| 6430022 | Method and apparatus for controlling chucking force in an electrostatic | — | 2002-08-06 |
| 6416822 | Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) | Tony P. Chiang | 2002-07-09 |