Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426304 | Post etch photoresist strip with hydrogen for organosilicate glass low-&kgr; etch applications | Ting-An Chien, Ian J. Morey | 2002-07-30 |
| 6410437 | Method for etching dual damascene structures in organosilicate glass | Ian J. Morey | 2002-06-25 |
| 6383931 | Convertible hot edge ring to improve low-K dielectric etch | Susan Ellingboe, Christine Janowiak, John Lang, Ian J. Morey | 2002-05-07 |