Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383931 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, John Lang, Ian J. Morey | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383931 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, John Lang, Ian J. Morey | 2002-05-07 |