Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402592 | Electrochemical methods for polishing copper films on semiconductor substrates | Mei Zhu, Chiu H. Ting | 2002-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402592 | Electrochemical methods for polishing copper films on semiconductor substrates | Mei Zhu, Chiu H. Ting | 2002-06-11 |