Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475922 | Hard mask process to control etch profiles in a gate stack | — | 2002-11-05 |
| 6399432 | Process to control poly silicon profiles in a dual doped poly silicon process | Subhas Bothra | 2002-06-04 |
| 6342428 | Method for a consistent shallow trench etch profile | Calvin T. Gabriel, Edward Yeh | 2002-01-29 |