Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501585 | Multi-beam exposure apparatus | Takashi Shiraishi, Masao Yamaguchi | 2002-12-31 |
| 6452709 | Multi-beam exposure unit | Takashi Shiraishi, Masao Yamaguchi | 2002-09-17 |
| 6337757 | Multi-beam exposure unit | Takashi Shiraishi, Masao Yamaguchi | 2002-01-08 |