Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501585 | Multi-beam exposure apparatus | Masao Yamaguchi, Yasuyuki Fukutome | 2002-12-31 |
| 6452709 | Multi-beam exposure unit | Masao Yamaguchi, Yasuyuki Fukutome | 2002-09-17 |
| 6381078 | Optical device | Masao Yamaguchi | 2002-04-30 |
| 6347003 | Multi-beam laser exposer unit | Masao Yamaguchi | 2002-02-12 |
| 6337757 | Multi-beam exposure unit | Masao Yamaguchi, Yasuyuki Fukutome | 2002-01-08 |