Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352628 | Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device | Michio Sato, Takashi Yamanobe, Tohru Komatsu, Yoshiharu Fukasawa, Noriaki Yagi +1 more | 2002-03-05 |