Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460422 | Device for calculating a torque of a rotating member | Hidehiko Kuroda, Shigeru Kanemoto, Takuhisa Kondo, Makoto Ochiai, Hitoshi Sakakida +5 more | 2002-10-08 |
| 6352628 | Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device | Takashi Yamanobe, Tohru Komatsu, Yoshiharu Fukasawa, Noriaki Yagi, Toshihiro Maki +1 more | 2002-03-05 |