Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440766 | Microfabrication using germanium-based release masks | — | 2002-08-27 |
| 6433401 | Microfabricated structures with trench-isolation using bonded-substrates and cavities | Mark Alan Lemkin, Thor Juneau, Allen W. Roessig | 2002-08-13 |
| 6386032 | Micro-machined accelerometer with improved transfer characteristics | Mark Alan Lemkin, Allen W. Roessig, Thor Juneau | 2002-05-14 |