Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433401 | Microfabricated structures with trench-isolation using bonded-substrates and cavities | William A. Clark, Mark Alan Lemkin, Thor Juneau | 2002-08-13 |
| 6386032 | Micro-machined accelerometer with improved transfer characteristics | Mark Alan Lemkin, Thor Juneau, William A. Clark | 2002-05-14 |