Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491764 | Method and apparatus for removing a liquid from a surface of a rotating substrate | Mark Meuris, Marc Heyns | 2002-12-10 |
| 6472294 | Semiconductor processing method for processing discrete pieces of substrate to form electronic devices | Marc Meuris, Marc Heyns | 2002-10-29 |
| 6398975 | Method and apparatus for localized liquid treatment of the surface of a substrate | Marc Meuris, Marc Heyns | 2002-06-04 |
| 6387827 | Method for growing thin silicon oxides on a silicon substrate using chlorine precursors | Michael J. McGeary, Hessel Sprey, Karine Kenis, Marc Schaekers, Marc Heyns | 2002-05-14 |
| 6334902 | Method and apparatus for removing a liquid from a surface | Marc Meuris, Marc Heyns | 2002-01-01 |