Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387827 | Method for growing thin silicon oxides on a silicon substrate using chlorine precursors | Paul Mertens, Michael J. McGeary, Hessel Sprey, Karine Kenis, Marc Heyns | 2002-05-14 |