Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479195 | Mask absorber for extreme ultraviolet lithography | Heinrich Kirchauer | 2002-11-12 |
| 6355381 | Method to fabricate extreme ultraviolet lithography masks | Mark Thiec-Hien Tran | 2002-03-12 |