Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479195 | Mask absorber for extreme ultraviolet lithography | Pei-Yang Yan | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479195 | Mask absorber for extreme ultraviolet lithography | Pei-Yang Yan | 2002-11-12 |