Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479391 | Method for making a dual damascene interconnect using a multilayer hard mask | Jihperng Leu, Chia-Hong Jan | 2002-11-12 |
| 6448177 | Method of making a semiconductor device having a dual damascene interconnect spaced from a support structure | Xiaorong Morrow | 2002-09-10 |