Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479391 | Method for making a dual damascene interconnect using a multilayer hard mask | Patrick Morrow, Chia-Hong Jan | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479391 | Method for making a dual damascene interconnect using a multilayer hard mask | Patrick Morrow, Chia-Hong Jan | 2002-11-12 |