Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464568 | Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing | Anne Miller, A. Feller | 2002-10-15 |
| 6443814 | Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing | Anne Miller, A. Feller | 2002-09-03 |
| 6375552 | Slurries for chemical mechanical polishing | Daniel A. Feller | 2002-04-23 |
| 6358853 | Ceria based slurry for chemical-mechanical polishing | Allen D. Feller, Mark Buehler, Paul B. Fischer | 2002-03-19 |