Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464568 | Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing | A. Feller, Kenneth Cadien | 2002-10-15 |
| 6443814 | Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing | A. Feller, Kenneth Cadien | 2002-09-03 |