Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499354 | Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices | Nader Najafi, Srinivas Tadigadapa, Yafan Zhang | 2002-12-31 |