Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499354 | Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices | Sonbol Massoud-Ansari, Srinivas Tadigadapa, Yafan Zhang | 2002-12-31 |
| 6477901 | Micromachined fluidic apparatus | Srinivas Tadigadapa, Chialun Tsai, Yafan Zhang | 2002-11-12 |
| 6338284 | Electrical feedthrough structures for micromachined devices and methods of fabricating the same | Yafan Zhang, Terry Hull | 2002-01-15 |