Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403967 | Magnet system for an ion beam implantation system using high perveance beams | Jiong Chen, Eric Antonissen | 2002-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403967 | Magnet system for an ion beam implantation system using high perveance beams | Jiong Chen, Eric Antonissen | 2002-06-11 |