Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403967 | Magnet system for an ion beam implantation system using high perveance beams | Jinliang Chen, Eric Antonissen | 2002-06-11 |
| 6338775 | Apparatus and method for uniformly depositing thin films over substrates | — | 2002-01-15 |