Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440827 | Method for fabricating a semiconductor component having a wiring which runs piecewise in the substrate, and also a semiconductor component which can be fabricated by this method | Helga Braun, Ronald Kakoschke, Regina Stokan, Gunther Plasa | 2002-08-27 |
| 6388320 | Vertically integrated semiconductor configuration | Michael Smola | 2002-05-14 |