Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492259 | Process for making a planar integrated circuit interconnect | Bachir Dirahoui, Daniel C. Edelstein, Robert C. Greenlese | 2002-12-10 |
| 6440813 | Process of manufacturing a DRAM cell capacitor having increased trench capacitance | Christopher N. Collins, James P. Norum, Stefan Schmitz | 2002-08-27 |
| 6337516 | Technique for extending the limits of photolithography | James G. Ryan | 2002-01-08 |