Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420269 | Cerium oxide abrasive for polishing insulating films formed on substrate and methods for using the same | Jun Matsuzawa, Yasushi Kurata, Kiyohito Tanno | 2002-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420269 | Cerium oxide abrasive for polishing insulating films formed on substrate and methods for using the same | Jun Matsuzawa, Yasushi Kurata, Kiyohito Tanno | 2002-07-16 |