Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420269 | Cerium oxide abrasive for polishing insulating films formed on substrate and methods for using the same | Jun Matsuzawa, Yasushi Kurata, Yoshio Honma | 2002-07-16 |
| 6343976 | Abrasive, method of polishing wafer, and method of producing semiconductor device | Masato Yoshida, Toranosuke Ashizawa, Hiroki Terazaki, Yuuto Ootuki, Yasushi Kurata +1 more | 2002-02-05 |