Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474080 | Cryopump system with modular electronics | John J. Varone, Daniel R. Jankins | 2002-11-05 |
| 6461113 | Electronically controlled vacuum pump | Peter W. Gaudet, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more | 2002-10-08 |